PHY10131_Electro-Micro-Mechanical Systems

1. General information about the module

  • Module code: PHY10131   

  • Vietnamese module designation:  HỆ VI CƠ ĐIỆN TỬ (MEMS)

  • English module designation: Electro-Micro-Mechanical Systems

  • Credit points: 2

  • Workload:

- Contact Hours: Lectures, lesson: 30 hours

- Lab works, project, seminar: 0

- Exercise: 0

- Private study: 15 hours 

  • Type of module: Specialization

  • Required and recommended prerequisites for joining the module: Integrated Circuit Design

2. Brief description of the modules

  • The role of the course: Knowledge of microelectronics and semiconductor technology

  • Course placement: Students typically take this course in their 6th or 7th semester of a 4-year undergraduate or engineering program, or in their second year of a related master's program.

  • Equipping students with the knowledge to connect semiconductor physics, crystallography, and semiconductor technology, enabling them to understand the structure and operation of semiconductor devices and microelectromechanical systems (MEMS).

  • Relationship to other courses: This course builds upon knowledge gained in semesters 3, 4, and 5, providing a foundation for practical applications and supporting the development of seminar topics or theses.