1. General information about the module
- Module code : PHY10230
- Vietnamese module designation: CÔNG NGHỆ CHẾ TẠO LINH KIỆN BÁN DẪN
- English module designation: Technology of Semiconductor Device Fabrication
- Credit points: 4
- Workload:
- Contact Hours: Lectures, lesson: 45 hours
- Lab works, project, seminar: 30 hours
- Exercise: 0
- Private study: 90 hours
- Type of module: Specialization
- Required and recommended prerequisites for joining the module: None
2. Brief description of the modules
This course equips learners with fundamental and systematic knowledge of the basic processes in semiconductor technology, such as pattern fabrication and device fabrication. Basic semiconductor processes include plasma generation, vacuum, chemical processes, and photolithography. This knowledge block serves as a foundation for students to understand and master subsequent parts of the curriculum. The pattern fabrication section will focus on two main processes: doping and thin film deposition. The final part of the course will introduce the processes in the final stages of fabricating optical and electrical semiconductor devices.