SEM10003_Semiconductor Manufacturing Technology

  1. General course information
  • Course code: SEM10003   
  • Course title: BASIC SEMICONDUCTOR FABRICATION TECHNOLOGY
  • Course title in English: Semiconductor Manufacturing Technology
  • Credits: 3
  • Course structure:
  • Lecture hours: 30
  • Practical hours: 30
  • Tutorial hours:
  • Other (self-study hours): 90
  • Knowledge block: Disciplinary foundation
  • Prerequisites: None
  • Prior courses: None
  1. Brief course description:

The course introduces the manufacturing processes for various semiconductor electronic devices such as solar cells and sensors. The main processes are photolithography, silicon fabrication, ion implantation, chemical vapour deposition and physical vapour deposition. The relationship between the performance of these two device types and the fabrication process is also covered.