- General course information
- Course code: SEM10004
- Course title: MICROFABRICATION TECHNIQUES
- Course title in English: Microfabrication Technology
- Credits: 3
- Course structure:
- Lecture hours: 15
- Practical hours: 60
- Tutorial hours: 0
- Other (self-study hours): 90
- Knowledge block: Disciplinary foundation
- Prerequisites: None
- Prior courses: None
- Brief course description:
The course has two parts:
The lectures begin with basic cleanroom design, cleanroom classification standards, the various sources of contamination, and airflow and air filtration in cleanrooms. Different types of cleanroom are discussed, with a focus on semiconductor and nanotechnology applications. Chemical handling and laboratory safety are addressed in the context of practical cleanroom exercises.
The second and most important part of the lectures covers in detail the various lithography-based methods of nanofabrication. This knowledge is then applied directly in the practical sessions.