SEM10105_Sản xuất linh kiện bán dẫn và kiểm soát quy trình

  1. ​​​​​​​​​​​​​​General course information
  • Course code: SEM10105   
  • Course title: SẢN XUẤT LINH KIỆN BÁN DẪN VÀ KIỂM SOÁT QUY TRÌNH
  • Course title in English: Semiconductor Devices Manufacturing and Process Control
  • Credits: 3
  • Course structure:
  • Lecture hours: 30
  • Practical hours: 30
  • Tutorial hours: 0
  • Other (self-study hours): 90
  • Knowledge block: Specialisation
  • Prerequisites: Kỹ thuật vi chế tạo; Vật lý linh kiện bán dẫn; Basic Semiconductor Fabrication Technology
  • Prior courses:Vật lý bán dẫn và nano bán dẫn; Vật lý linh kiện bán dẫn; Basic Semiconductor Fabrication Technology
  1. Brief course description:

Gives students a general knowledge of the complete fabrication process for a semiconductor device and of process control. Students also carry out one or more steps of a device fabrication process in the laboratory, so as to understand the experimental work and verify the theory they have studied.