- General course information
- Course code: SEM10110
- Course title: PLASMA THERMODYNAMIC SIMULATION IN SEMICONDUCTOR FABRICATION
- Course title in English: Simulation Plasma Thermodynamics of semiconductor fabrication
- Credits: 3
- Course structure:
- Lecture hours: 30
- Practical hours: 30
- Tutorial hours: 0
- Other (self-study hours): 90
- Knowledge block: Specialisation
- Prerequisites: None
- Prior courses: None
- Brief course description:
The course has two main parts, covering both theory and practice:
- Review of the Matlab programming language: students apply Matlab to simulate thermodynamic processes in plasma systems.
- Theory: students study gas-discharge plasma systems, the types of collision occurring in them, and the motion and collisions of charged particles and atoms in a DC magnetron sputtering system, and formulate models of these processes.
- Practice 1: computing the thermodynamic distributions of a particle system, computing the mean free path, and determining the quantities that characterise transport processes such as molecular diffusion, momentum diffusion and energy diffusion.
- Practice 2: simulating models of motion and collision in plasma and of thin-film deposition.
This course belongs to the curriculum on semiconductor simulation and its applications. The theory is taught to the whole class, while practical work is done in groups.