SEM10121_Phương pháp phân tích khuyết tật bán dẫn

  1. General course information
  • Course code: SEM10121  
  • Course title: SEMICONDUCTOR DEFECT ANALYSIS METHODS
  • Course title in English: Characterization techniques for defects in Semiconductor materials
  • Credits: 3
  • Course structure:
  • Lecture hours: 45
  • Practical hours:
  • Tutorial hours: 0
  • Other (self-study hours): 90
  • Knowledge block: Specialisation
  • Prerequisites: Semiconductor Device Physics; Basic Semiconductor Fabrication Technology
  • Prior courses: Semiconductor Device Physics; Basic Semiconductor Fabrication Technology
  1. Brief course description:

The course covers the types of defect found in semiconductor materials, the effect of defects on the properties of semiconductor materials and devices, and the methods used to identify defects in them.