1. General information about the module
Module code: PET10124
Vietnamese module designation: KỸ THUẬT VI CHẾ TẠO
English module designation: Microfabrication Technology
Credit points: 3
Workload:
- Contact Hours: Lectures, lessons: 30 hours (in class)
- Lab works, project, seminar: 30 hours
- Exercise: 0 hours
- Private study: 90 hours
Type of module: Specialized
Required and recommended prerequisites for joining the module: None
Modules taken before this module: None
2. Module objectives/intended learning outcomes
This course provides students with comprehensive foundational knowledge and practical skills in microfabrication technology, with a focus on core processes performed in a cleanroom environment. The course covers three fundamental technology pillars: photolithography for patterning structures, thin-film deposition for building functional material layers, and etching for the precise removal of unwanted materials.
Students will learn how to design and sequentially integrate these processes to fabricate functional structures and devices at the micro- and nanoscale. The course progresses from the fabrication of basic electronic devices to the development of more complex systems, including Micro-Electro-Mechanical Systems (MEMS), optoelectronic devices, and advanced sensors.
The practical component is designed to directly apply theoretical knowledge to real-world fabrication processes, allowing students to experience a complete workflow from design and simulation to fabrication and device characterization. Upon completion of the course, students will be equipped with the knowledge and practical skills necessary to participate in research and development (R&D) activities in high-technology fields requiring microscale and nanoscale fabrication expertise.