I. Dept. of Applied Physics:
1. DC magnetron DC sputtering machine system
Department of Applied Physics designs and manufactures DC magnetron sputtering thin film machine system, with the following parameters:
- Stainless steel vacuum chamber, diameter 320 x 430 mm. The pressure in the chamber reaches 10-4 - 10-5 torr
- Water cooling system.
- Round or square magnetron system (3 systems in a vacuum chamber).
- Types of exhaust valves into the chamber (automatic valves), air filters.
- Power supply unit, pressure sensor ....
- Vacuum gauge.
- Primary vacuum pumps, diffused vacuum pumps.
For further information contact us at Applied Physics BM
2. Filing film evaporating film (for teaching and researching)
For further information contact us at Applied Physics BM
3. Good quality ceramic and metal target, cheap price, for research purposes
- Target is rounded (diameter 75 mm) and rectangular (there are many different sizes that can vary according to the magnetron system)
- ZnO ceramic target (99.9%) and (ZnO: In, ZnO: Al; ZnO: Ga; ZnO: Ti ...... with different doping concentrations)
- TiO2 ceramic target.
- Target metal Zn (99.9%), Ag, Al .....
For further information contact us at Applied Physics BM.
4. Thin film applications (optical, electrical, photocatalyst, electrochromic, mechanical .....)
- Photocatalyst TiO2, TiO2: Sn, and TiO2: N:
TiO2 material is a semiconductor with very strong photocatalytic properties, widely used in environmental treatment. There have been many works at home and abroad studying this material. Only by illumination, the organic matter, the dirt on the film decompose and the membrane surface becomes clean. This property is applied to clean water, air and disinfect. TiO2 catalyst has been researched and manufactured in Department of Applied Physics by both methods: Sputtering and Sol-gel, initially. There have been significant successes.
For further information, please contact us:
+ Sputtering method
Ph.D. Vu Thi Hanh Thu
Email: vththu@phys.hcmuns.edu.vn
Ph.D. Le Tran
Email: ltran@phys.hcmuns.edu.vn
+ Sol-gel method
Ph.D. Lam Quang Vinh
Email: lqvinh@hcmuns.edu.vn
- AR multi-layer anti-reflective membrane (TiO2 / SiO2)
TiO2 / SiO2 multi-layer anti-reflective film (2-4 layers) in visible area, made on glass substrate with low reflectance of 1-2%, applied in microscope lens systems, cameras, ....
Membranes were successfully manufactured in the Department of Applied Physics, by the magnetron DC and RF sputtering.
For further information please contact: Ph.D. Le Vu Tuan Hung
Email: lthung@phys.hcmuns.edu.vn
- Types of hot mirrors passing through
The multilayer TiO2 (outer) / TiO2 (buffered) / TiN / Ag / TiN / TiO2 (inner) multilayer films have two important properties: the transmission of hot mirror and photocatalytic properties. Hot mirror properties are applied to manufacture energy-saving glass for high-rise buildings, heat-resistant glass for cars, ... Photocatalyst photocatalytic properties help the film to self-sterilize and prevent dirt. , anti-standing water, ... The effect of each layer of film: + TiO2 layer (clear): helps anti-reflective (anti-reflective). + TiN layer: helps to increase the ability of networking between TiO2 and Ag layers, and, at the same time, increases the mechanical strength for Ag layer. + Ag layer: highly reflective infrared radiation + TiO2 layer (outside): protect TiN layer from oxidation TiO2 multi-layer membrane (outside) / TiO2 (buffer) / TiN / Ag / TiN / TiO2 (inside) already was fabricated successfully in the Department of Applied Physics by the Magnetron DC sputtering method near equilibrium in the scientific work of Ph.D. Le Tran.
For further information, please contact Ph.D. Le Tran
Email: ltran@phys.hcmuns.edu.vn
- Mechanical membrane (hard film) TiN, ZrN:
Hard films are defined as films with high hardness, low friction coefficient, little wear. Hard films are often applied on top of high rigidity tools such as drill bits, cutting heads or on metal parts to increase their life. and chemically inert like TiN, TiC, ZrN, ... TiN films have very high mechanical, chemical and thermal properties and have photoelectric properties like gold metal film (Au). High hardness: 21 - 24 Gpa. Melting heat: 2950 0C. Resistivity 20 - 30 mW.cm.
ZrN film has greater hardness than TiN, extremely good corrosion resistance. ZrN film can also serve in high-end fashion fields: creating a golden coating on the frames, watch faces ...)
For further information please contact: Ph.D. Le Tran
Email: ltran@phys.hcmuns.edu.vn
- Electrochromatic films WO3, V2O5 .....
WO3 (Tungsten Oxide) is a material with many interesting physical and chemical properties and is being studied extensively, most notably electrochromic. Electromagnetism is a property where when an electric field is applied to a membrane, the color or transmission of the membrane changes. WO3 electrochromic membrane has great potential in many fields of life such as: rechargeable batteries for electronic devices, smart windows, anti-glare glass, anti-reflective. The WO3 membrane was initially manufactured successfully at the Department of Applied Physics by Magnetron RF Sputtering on glass substrates.
For further information please contact: Ph.D. Le Van Ngoc
Email: lvngoc@phys.hcmuns.edu.vn
- ITO, ZnO transparent conductive films, n and p type semiconductor films
ZnO films are considered to be transparent conductive oxide (TCO) films and are often used to replace ITO films. It has a large band gap of about 3.3eV, the resistance of the membrane is quite low about 10-6Ωm, the absorption coefficient of the membrane in the visible region is about 5.103cm-1. In addition, doped ZnO films are a new and promising field of research. Doped films usually focus on IIIA doped elements such as Al, Ga, In and IA group elements such as Li and Ni.
N and p type doped ZnO and ZnO films were successfully fabricated at the Department of Applied Physics by the Magnetron DC Sputtering method.
For further information please contact: Ph.D. Le Vu Tuan Hung
Email: lthung@phys.hcmuns.edu.vn
- High reflective membrane Al
Aluminum films coated on glass substrates can be reflective mirrors with high reflectivity, about 90% for most of the ultraviolet, visible, and near infrared spectral regions. It can be used as a buffer, to fill in the protrusions of a surface, a material that needs to be highly reflective and to protect the material from oxidation. In addition to aluminum thin film, one can create aluminum foil. to package food, preserve them from being affected by the air environment. Aluminum (Al) coating is made at Department of Applied Physics by high-evaporation evaporation method with high reflection and uniform uniformity. relative face.
For further information please contact: MSc. Nguyen Duc Hao
Email: ndhao@phys.hcmuns.edu.vn
5. Calculation simulation programs
- Optical properties and simulated monolayer, multi-layer membrane by genetic algorithm, written in Matlab language.
- Optimal programs to optimize parameters in magnetron sputtering system .... by kinetic algorithm Monter Carlo, written in Matlab language.
For further information please contact: Ph.D. Le Vu Tuan Hung
Email: lthung@phys.hcmuns.edu.vn