On September 14–15, 2026, the University of Science, Vietnam National University Ho Chi Minh City (VNU-HCM) organized the specialized course “Advanced Semiconductor Manufacturing Technologies,” led by Dr. Nguyen Van Son, VNU350 Visiting Professor and Principal Research Staff at the IBM Research – AI Hardware Research Center, USA.
The course provided participants with in-depth knowledge of modern semiconductor manufacturing processes and key technologies underlying advanced integrated circuit fabrication, including DUV/EUV lithography, CVD/ALD thin-film deposition, plasma processing and etching, ion implantation, and chemical mechanical planarization (CMP). The course also examined the evolution of advanced transistor architectures, from Planar MOSFET and FinFET to GAA/Nanosheet structures, providing participants with a broader understanding of the development of nanoscale semiconductor manufacturing technologies.
In addition to fabrication processes, the course addressed topics related to nanomaterials, dielectric and metal materials, device integration, and semiconductor packaging, connecting fundamental knowledge with practical considerations in semiconductor research and technology development.
Drawing on extensive research experience in nanoscale semiconductor materials and technologies, CVD/PVD/ALD, plasma processing, low-k materials, logic and memory technologies, AI hardware integration, and system-on-chip (SoC) technologies, Dr. Nguyen Van Son provided participants with specialized technical knowledge and practical perspectives shaped by research and technology development in an international academic and industrial environment.
The course provided participants with an opportunity to keep pace with recent technological advances, gain a deeper understanding of modern semiconductor fabrication processes, and explore emerging directions shaping the next generation of advanced semiconductor technologies. The program also contributed to strengthening the connection between higher education, scientific research, and the development of highly skilled human resources for the semiconductor industry.
